Assignment of Assignor's Interest

Recorded: 2014-06-19 Pages: 5

Assignors

MORIYA, SHUJI

Executed: 2014-06-03

ANDO, ATSUSHI

Executed: 2014-06-08

Assignee

TOKYO ELECTRON LIMITED

AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN

Covered Property (1)

Etching Method and Non-Transitory Storage Medium

Patent: 9,012,331 →

Application: 14/290,036 →

Publication: US 2014/0357085

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.