Patent Assignment
Reel/Frame 033138/0548
Assignment of Assignor's Interest
Recorded: 2014-06-19
Pages: 12
Assignors
PARK, ALLEN
Executed: 2013-12-13
CHANG, ELLIS
Executed: 2013-12-16
ADEL, MICHAEL
Executed: 2013-12-29
BHASKAR, KRIS
Executed: 2014-06-18
LEVY, ADY
Executed: 2013-12-11
WIDMANN, AMIR
Executed: 2013-12-29
WAGNER, MARK
Executed: 2013-12-29
RONG, SONGNIAN
Executed: 2014-01-29
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Universal Target Based Inspection and Metrology