Patent Assignment
Reel/Frame 033147/0837
Assignment of Assignor's Interest
Recorded: 2014-06-20
Pages: 4
Assignor
KAWABATA, ATSUSHI
Executed: 2014-06-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
De-Chuck Control Method and Control Device for Plasma Processing Apparatus