Patent Assignment
Reel/Frame 033148/0480
Assignment of Assignor's Interest
Recorded: 2014-06-20
Pages: 3
Assignee
KLA-TENCOR CORPORATION
1 TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Thickness Change Monitor Wafer for in Situ Film Thickness Monitoring
Thickness Change Monitor Wafer for In Situ Film Thickness Monitoring
Application:
61/773,318 →