Patent Assignment
Reel/Frame 033151/0705
Assignment of Assignor's Interest
Recorded: 2014-06-20
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing System, Substrate Processing Apparatus and Method for Accumulating Data for Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.