Patent Assignment
Reel/Frame 033154/0381
Assignment of Assignor's Interest
Recorded: 2014-06-23
Pages: 5
Assignors
SCHMITT-WEAVER, EMIL PETER
Executed: 2012-12-17
LUEHRMANN, PAUL FRANK
Executed: 2012-12-17
BOON, EDUARDUS JOHANNES GERARDUS
Executed: 2012-12-18
SLOTBOOM, DAAN MAURITS
Executed: 2012-12-18
VAN DAMME, JEAN-PHILIPPE XAVIER
Executed: 2012-12-18
HENKE, WOLFGANG
Executed: 2012-12-17
YPMA, ALEXANDER
Executed: 2012-12-17
KEA, MARC JURIAN
Executed: 2012-12-17
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Method of Operating a Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product