Patent Assignment
Reel/Frame 033162/0333
Assignment of Assignor's Interest
Recorded: 2014-06-24
Pages: 8
Assignors
WALDMANN, OLE
Executed: 2014-01-15
PAPE, ERIC A.
Executed: 2014-01-15
O'NEILL, ROBERT GRIFFITH
Executed: 2014-03-10
MARTINEZ, FRANCISCO
Executed: 2014-01-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Calculating Power Input to an Array of Thermal Control Elements to Achieve a Two-Dimensional Temperature Output