Patent Assignment
Reel/Frame 033173/0723
Confirmatory License
Recorded: 2014-06-25
Pages: 2
Assignor
COLORADO STATE UNIVERSITY RESEARCH FOUNDATION
Executed: 2014-04-16
Assignee
NATIONAL SCIENCE FOUNDATION
4201 WILSON BLVD, ROOM 1265, ARLINGTON, VIRGINIA, 22230
Covered Property
(1)
Nanometer-Scale Lithography Using Extreme Ultraviolet/Soft X-Ray Laser Interferometry
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.