Patent Assignment
Reel/Frame 033208/0198
Assignment of Assignor's Interest
Recorded: 2014-06-30
Pages: 4
Assignors
KOMATSU, TOMOHITO
Executed: 2014-06-27
IKEDA, TARO
Executed: 2014-06-27
KASAI, SHIGERU
Executed: 2014-06-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Antenna for Plasma Generation, Plasma Processing Apparatus and Plasma Processing Method