Patent Assignment
Reel/Frame 033212/0051
Assignment of Assignor's Interest
Recorded: 2014-06-30
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus for Managing Transfer State of Substrate Gas Storage Container Based on Supply Flow Rate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.