Patent Assignment
Reel/Frame 033219/0988
Assignment of Assignor's Interest
Recorded: 2014-07-01
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method to Improve Etch Selectivity During Silicon Nitride Spacer Etch