Patent Assignment
Reel/Frame 033222/0210
Assignment of Assignor's Interest
Recorded: 2014-07-01
Pages: 5
Assignors
TAKIGUCHI, YASUSHI
Executed: 2014-06-18
YAMAMOTO, TARO
Executed: 2014-06-18
KYOUDA, HIDEHARU
Executed: 2014-06-19
MUTA, KOSHI
Executed: 2014-06-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-66325, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus, Substrate Cleaning Method, and Storage Medium