Patent Assignment
Reel/Frame 033228/0926
Assignment of Assignor's Interest
Recorded: 2014-07-02
Pages: 4
Assignor
ISHII, TAKAYUKI
Executed: 2014-06-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method and Plasma Etching Apparatus