Patent Assignment
Reel/Frame 033284/0604
Assignment of Assignor's Interest
Recorded: 2014-07-10
Pages: 2
Assignor
NAKAGAWA, YUKITO
Executed: 2014-07-01
Assignee
CANON ANELVA CORPORATION
5-1, KURIGI 2-CHOME, ASAO-KU, KAWASAKI-SHI, 215-8550, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Etching Method of Metal Film, and Manufacturing Method of Magnetoresistive Effect Element