Patent Assignment
Reel/Frame 033343/0394
Assignment of Assignor's Interest
Recorded: 2014-07-18
Pages: 6
Assignors
INOUE, MASAKI
Executed: 2014-07-14
OZU, TOSHIHISA
Executed: 2014-07-08
TANIKAWA, TAKEHIRO
Executed: 2014-07-02
YOSHIKAWA, JUN
Executed: 2014-07-02
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Processing Base Body to Be Processed