Patent Assignment
Reel/Frame 033366/0220
Assignment of Assignor's Interest
Recorded: 2014-07-22
Pages: 5
Assignors
TITUS, MONICA
Executed: 2014-07-11
KAMARTHY, GOWRI
Executed: 2014-07-11
SINGH, HARMEET
Executed: 2014-07-18
KIMURA, YOSHIE
Executed: 2014-07-18
SHEN, MEIHUA
Executed: 2014-07-18
ZHOU, BAOSUO
Executed: 2014-07-21
ZHOU, YIFENG
Executed: 2014-07-21
HOANG, JOHN
Executed: 2014-07-07
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Planarizing an Upper Surface of a Semiconductor Substrate in a Plasma Etch Chamber