Patent Assignment
Reel/Frame 033378/0670
Assignment of Assignor's Interest
Recorded: 2014-07-24
Pages: 3
Assignor
LAENGLE, MARIO
Executed: 2014-07-22
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, 07745 JENA, GERMANY
Covered Property
(1)
Method for Establishing Distortion Properties of an Optical System in a Microlithographic Measurement System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.