Patent Assignment
Reel/Frame 033386/0399
Assignment of Assignor's Interest
Recorded: 2014-07-24
Pages: 14
Assignors
ANDO, TAKASHI
Executed: 2014-07-14
JAGANNATHAN, HEMANTH
Executed: 2014-04-17
KANNAN, BALAJI
Executed: 2014-07-14
KRISHNAN, SIDDARTH A.
Executed: 2014-07-11
KWON, UNOH
Executed: 2014-07-17
RAJARAM, REKHA
Executed: 2014-07-15
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method of Patterning Dopant Films in High-K Dielectrics in a Soft Mask Integration Scheme