Patent Assignment
Reel/Frame 033390/0066
Assignment of Assignor's Interest
Recorded: 2014-07-25
Pages: 4
Assignor
LEMSON, GARY M.
Executed: 2014-07-16
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Multi-Range Voltage Sensor and Method for a Voltage Controlled Interface of a Plasma Processing System