Assignment of Assignor's Interest

Recorded: 2014-07-25 Pages: 6

Assignors

JOHNSON, HALE

Executed: 2014-07-23

GEORGE, GREGORY

Executed: 2014-07-24

BRENNEN, MICHAEL

Executed: 2014-07-23

Assignee

SUSS MICROTEC LITHOGRAPHY GMBH

90 SCHLEISSHEIMER STR, GARCHING, 85748, GERMANY

Covered Properties (2)

Apparatus and Method for Aligning and Centering Wafers

Patent: 9,859,141 →

Application: 14/330,497 →

Publication: US 2014/0319786

Apparatus and Method for Semiconductor Wafer Leveling, Force Balancing and Contact Sensing

Patent: 9,837,295 →

Application: 14/330,536 →

Publication: US 2014/0318683