Patent Assignment
Reel/Frame 033414/0202
Assignment of Assignor's Interest
Recorded: 2014-07-29
Pages: 3
Assignors
CHU, CHIA-HUA
Executed: 2010-11-16
LIN, CHUNG-HSIEN
Executed: 2010-11-16
CHENG, CHUN-WEN
Executed: 2010-11-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Fabricating MEMS Switch with Reduced Dielectric Charging Effect