Patent Assignment
Reel/Frame 033414/0423
Assignment of Assignor's Interest
Recorded: 2014-07-29
Pages: 4
Assignor
DENG, WUFENG
Executed: 2014-07-24
Assignees
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
NO. 18, WEN CHANG RD., ECONOMIC-TECHNOLOGICAL, DEVELOPMENT AREA, DAXING DISTRICT, BEIJING, 100716, CHINA
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
18 ZHANGJIANG ROAD, PUDONG NEW AREA, SHANGHAI, 201203, CHINA
Covered Property
(1)
Chemical Mechanical Planarization Apparatus and Methods