Patent Assignment
Reel/Frame 033449/0638
Assignment of Assignor's Interest
Recorded: 2014-08-01
Pages: 3
Assignors
DANEK, MICHAL
Executed: 2014-07-28
GAO, JUWEN
Executed: 2014-07-28
FELLIS, AARON
Executed: 2014-07-28
JUAREZ, FRANCISCO
Executed: 2014-07-28
LAI, CHIUKIN STEVEN
Executed: 2014-07-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatuses for Atomic Layer Cleaning of Contacts and Vias