Patent Assignment
Reel/Frame 033496/0329
Assignment of Assignor's Interest
Recorded: 2014-08-08
Pages: 7
Assignors
HASEBE, KAZUHIDE
Executed: 2014-07-28
TAKAHASHI, KAZUYA
Executed: 2014-07-28
KOMORI, KATSUHIKO
Executed: 2014-07-28
FURUSAWA, YOSHIKAZU
Executed: 2014-07-28
OKADA, MITSUHIRO
Executed: 2014-07-28
HAYASHI, HIROYUKI
Executed: 2014-07-28
KAKIMOTO, AKINOBU
Executed: 2014-07-28
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, TOKYO, 1076325, JAPAN
Covered Property
(1)
Silicon Film Forming Method, Thin Film Forming Method and Cross-Sectional Shape Control Method