Patent Assignment
Reel/Frame 033498/0095
Assignment of Assignor's Interest
Recorded: 2014-08-08
Pages: 3
Assignors
SUH, SONG-MOON
Executed: 2014-08-07
GUO, YUANHONG
Executed: 2014-08-07
XUAN, GUANGCHI
Executed: 2014-08-07
AGARWAL, PULKIT
Executed: 2014-08-07
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Cleaning of Chamber Components with Solid Carbon Dioxide Particles