Patent Assignment
Reel/Frame 033510/0080
Assignment of Assignor's Interest
Recorded: 2014-08-11
Pages: 6
Assignors
NOWAK, ROMUALD
Executed: 2014-08-06
KANG, HU
Executed: 2014-08-06
LAVOIE, ADRIEN
Executed: 2014-08-11
QIAN, JUN
Executed: 2014-08-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Single Ald Cycle Thickness Control in Multi-Station Substrate Deposition Systems