Patent Assignment
Reel/Frame 033525/0884
Assignment of Assignor's Interest
Recorded: 2014-08-13
Pages: 10
Assignors
UMEHARA, NAOYUKI
Executed: 2014-06-16
OHTANI, RYUJI
Executed: 2014-06-16
ITO, SHUNICHI
Executed: 2014-06-17
SEI, KAZUTAKA
Executed: 2014-06-12
NISHIDA, TOMOMASA
Executed: 2014-06-12
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
DAIHEN CORPORATION
2-1-11, TAGAWA, YODOGAWA-KU, OSAKA-SHI, OSAKA, 532-8512, JAPAN
Covered Property
(1)
Plasma Processing Apparatus