Patent Assignment
Reel/Frame 033551/0672
Assignment of Assignor's Interest
Recorded: 2014-08-18
Pages: 3
Assignor
HARADA, AKITOSHI
Executed: 2014-08-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Controlling Temperature and Plasma Processing Apparatus