Patent Assignment
Reel/Frame 033569/0170
Assignment of Assignor's Interest
Recorded: 2014-08-20
Pages: 11
Assignors
SHIH, CHIH-TSUNG
Executed: 2014-06-04
LEE, TIEN-HSI
Executed: 2014-06-04
CHEN, CHIA-JEN
Executed: 2014-06-05
CHIEN, SHANG-CHIEH
Executed: 2014-06-05
YU, SHINN-SHENG
Executed: 2014-06-04
CHEN, JENG-HORNG
Executed: 2014-06-04
YEN, ANTHONY
Executed: 2014-06-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method of Making an Extreme Ultraviolet Pellicle