Patent Assignment
Reel/Frame 033570/0836
Assignment of Assignor's Interest
Recorded: 2014-08-20
Pages: 8
Assignors
KUMAGAI, YASUNORI
Executed: 2014-07-09
TARUTANI, KOHEI
Executed: 2014-07-15
KAMEOKA, TAKASHI
Executed: 2014-07-15
YANAGITA, TOMOKO
Executed: 2014-07-15
MATSUI, RYOHEI
Executed: 2014-07-23
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
75 QUAI D'ORSAY,, PARIS, 75321 CEDEX 07, FRANCE
Covered Property
(1)
Film Formation Method and Film Formation Apparatus