Patent Assignment
Reel/Frame 033601/0955
Assignment of Assignor's Interest
Recorded: 2014-08-25
Pages: 4
Assignors
OGASAWARA, MASAHIRO
Executed: 2014-08-12
URAKAWA, MASAFUMI
Executed: 2014-08-20
HAYAKAWA, YOSHINOBU
Executed: 2014-08-12
KUBOTA, KAZUHIRO
Executed: 2014-08-18
WATANABE, HIKARU
Executed: 2014-08-18
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Silicon Oxide Film