Patent Assignment
Reel/Frame 033604/0917
Assignment of Assignor's Interest
Recorded: 2014-08-25
Pages: 3
Assignors
NA, JEONG-SEOK
Executed: 2014-08-19
YU, TIANHUA
Executed: 2014-08-18
DANEK, MICHAL
Executed: 2014-08-18
GOPINATH, SANJAY
Executed: 2014-08-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Void-Free Cobalt Gap Fill