Patent Assignment
Reel/Frame 033610/0364
Assignment of Assignor's Interest
Recorded: 2014-08-26
Pages: 5
Assignors
OGAWA, KAZUTO
Executed: 2014-07-28
NARISHIGE, KAZUKI
Executed: 2014-07-22
SATO, TAKANORI
Executed: 2014-07-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method