Patent Assignment
Reel/Frame 033611/0174
Assignment of Assignor's Interest
Recorded: 2014-08-26
Pages: 3
Assignors
YAGITA, TAKANORI
Executed: 2013-12-18
KABASAWA, MITSUAKI
Executed: 2013-12-16
SASAKI, HARUKA
Executed: 2013-12-16
Assignee
SEN CORPORATION
1-1 OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, JAPAN
Covered Property
(1)
Ion Implantation Apparatus, Beam Parallelizing Apparatus, and Ion Implantation Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.