Patent Assignment
Reel/Frame 033634/0188
Assignment of Assignor's Interest
Recorded: 2014-08-28
Pages: 3
Assignors
WONG, LAWRENCE
Executed: 2014-08-19
RAMASWAMY, KARTIK
Executed: 2014-08-20
YANG, YANG
Executed: 2014-08-20
LANE, STEVEN
Executed: 2014-08-20
FOVELL, RICHARD
Executed: 2014-08-20
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method of Real Time in-Situ Chamber Condition Monitoring Using Sensors and Rf Communication