Patent Assignment
Reel/Frame 033669/0361
Assignment of Assignor's Interest
Recorded: 2014-09-04
Pages: 4
Assignor
SATO, TAKEO
Executed: 2014-08-05
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Semiconductor Device Manufacturing Method, Substrate Processing Method, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.