Patent Assignment
Reel/Frame 033689/0434
Assignment of Assignor's Interest
Recorded: 2014-09-08
Pages: 5
Assignors
MURAKI, YUSUKE
Executed: 2014-08-29
KASAI, SHIGERU
Executed: 2014-09-01
SUZUKI, TOMOHIRO
Executed: 2014-08-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method, Etching Apparatus, and Storage Medium