Patent Assignment
Reel/Frame 033701/0864
Assignment of Assignor's Interest
Recorded: 2014-09-09
Pages: 6
Assignors
OHASHI, MASAKI
Executed: 2014-08-01
FUKUSHIMA, MASAHIRO
Executed: 2014-08-01
KOBAYASHI, TOMOHIRO
Executed: 2014-08-01
TANIGUCHI, RYOSUKE
Executed: 2014-08-01
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Sulfonium Salt, Chemically Amplified Resist Composition, and Pattern Forming Process