Patent Assignment
Reel/Frame 033702/0928
Assignment of Assignor's Interest
Recorded: 2014-09-09
Pages: 8
Assignors
MARUYAMA, TORU
Executed: 2014-09-01
MATSUO, HISANORI
Executed: 2014-09-01
MOTOSHIMA, YASUYUKI
Executed: 2014-09-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Polishing Method and Polishing Apparatus