Patent Assignment
Reel/Frame 033731/0588
Assignment of Assignor's Interest
Recorded: 2014-09-12
Pages: 14
Assignors
VENUGOPAL, VIJAYAKUMAR C
Executed: 2014-08-22
HERTEL, RICHARD J.
Executed: 2014-08-27
SINGH, VIKRAM
Executed: 2014-08-26
ALLEN, ERNEST E.
Executed: 2014-08-26
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Apparatus and Method for Efficient Materials Use During Substrate Processing