Patent Assignment
Reel/Frame 033731/0963
Assignment of Assignor's Interest
Recorded: 2014-09-12
Pages: 18
Assignors
SRINIVASAN, SWAMINATHAN
Executed: 2014-08-22
KHAJA, FAREEN ADENI
Executed: 2014-08-18
RUFFELL, SIMON
Executed: 2014-08-21
HAUTALA, JOHN
Executed: 2014-08-22
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Forming Angled Structures for Reduced Defects in Heteroepitaxy of Semiconductor Films