Patent Assignment
Reel/Frame 033737/0266
Assignment of Assignor's Interest
Recorded: 2014-09-15
Pages: 6
Assignors
TERASHITA, YUICHI
Executed: 2014-09-05
YOSHIHARA, KOUSUKE
Executed: 2014-09-05
TAKAYANAGI, KOJI
Executed: 2014-09-05
FURUSHO, TOSHINOBU
Executed: 2014-09-08
SASA, TAKASHI
Executed: 2014-09-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Processing Liquid Supplying Apparatus and Processing Liquid Supplying Method