Patent Assignment
Reel/Frame 033771/0895
Assignment of Assignor's Interest
Recorded: 2014-09-18
Pages: 8
Assignors
VUKKADALA, PRADEEP
Executed: 2014-09-05
CHEN, HAIGUANG
Executed: 2014-09-05
SINHA, JAYDEEP
Executed: 2014-09-08
VEERARAGHAVAN, SATHISH
Executed: 2014-09-05
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Process-Induced Distortion Prediction and Feedforward and Feedback Correction of Overlay Errors