Patent Assignment
Reel/Frame 033777/0135
Assignment of Assignor's Interest
Recorded: 2014-09-19
Pages: 22
Assignors
KIM, IN-KYO
Executed: 2014-08-19
LI, XIN
Executed: 2014-08-20
POSLAVSKY, LEONID
Executed: 2014-08-27
LEE, LIEQUAN
Executed: 2014-08-19
CAO, MENG
Executed: 2014-08-19
YOO, SUNGCHUL
Executed: 2014-08-19
SHCHEGROV, ANDREI V.
Executed: 2014-08-19
PARK, SANGBONG
Executed: 2014-08-19
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Multi-Model Metrology
Multi-Model Metrology High Number of Critical Parameter Determination Method for Semiconductor Devices
Application:
61/869,434 →