Patent Application
Provisional
App. No. 61/869,434
· Confirmation No. 4707
Multi-Model Metrology High Number of Critical Parameter Determination Method for Semiconductor Devices
Inventors:
Inkyo Kim, Xin Li, Leonid Poslavsky, Rich Lee, Meng Cao, Sungchul Yoo, Sen Park, Andrei Shchegrov
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-11-13 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-10-31 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 1 | View | |
| 2013-10-31 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-10-31 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-10-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-08-30 | NTC.MISS.PRT |
Notice to File Missing Parts | 2 | View | |
| 2013-08-30 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-08-23 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-08-23 | SPEC |
Specification | 13 | View | |
| 2013-08-23 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Inkyo Kim
Cupertino, CA
Xin Li
Shanghai, CHINA
Leonid Poslavsky
Belmont, CA
Rich Lee
Fremont, CA
Meng Cao
Union City, CA
Sungchul Yoo
Campbell, CA
Sen Park
Union City, CA
Andrei Shchegrov
Campbell, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P4257
- Confirmation No.
- 4707
Child
PCT
Claims priority from a provisional application
→
PCT/US2014/052142
Filed 2014-08-21
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/204,461
Filed 2016-07-07
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 14/459,516
· US 9,412,673
Filed 2014-08-14
· Patented Case
from
CAO, MENG,
KIM, IN-KYO,
LEE, LIEQUAN,
PARK, SANGBONG,
SHCHEGROV, ANDREI V.,
YOO, SUNGCHUL,
LI, XIN,
POSLAVSKY, LEONID
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-09-19
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Quick Facts
- App. No.
- 61/869,434
- Filed
- 2013-08-23
External Links