Assignment of Assignor's Interest

Recorded: 2014-09-19 Pages: 4

Assignor

YAHATA, TAKASHI

Executed: 2014-09-10

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device and Computer-Readable Recording Medium

Patent: 9,340,879 →

Application: 14/491,709 →

Publication: US 2015/0270119

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.