Patent Assignment
Reel/Frame 033799/0416
Assignment of Assignor's Interest
Recorded: 2014-09-23
Pages: 5
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Patent:
9,028,648 →
Application:
14/493,828 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.