Patent Assignment
Reel/Frame 033801/0468
Assignment of Assignor's Interest
Recorded: 2014-09-23
Pages: 3
Assignors
KANG, HU
Executed: 2014-08-04
KIM, WANKI
Executed: 2014-08-09
LAVOIE, ADRIEN
Executed: 2014-07-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods for Depositing Silicon Oxide