Patent Assignment
Reel/Frame 033805/0102
Assignment of Assignor's Interest
Recorded: 2014-09-24
Pages: 3
Assignor
AMIR, NURIEL
Executed: 2014-08-13
Assignee
KLA TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Scatterometry Overlay Metrology Targets and Methods