Patent Assignment
Reel/Frame 033811/0486
Assignment of Assignor's Interest
Recorded: 2014-09-24
Pages: 8
Assignors
LAVOIE, ADRIEN
Executed: 2014-07-23
KANG, HU
Executed: 2014-07-29
KUMAR, PURUSHOTTAM
Executed: 2014-07-25
SWAMINATHAN, SHANKAR
Executed: 2014-07-23
QIAN, JUN
Executed: 2014-07-23
PASQUALE, FRANK
Executed: 2014-07-24
BALDASSERONI, CHLOE
Executed: 2014-07-25
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatuses for Showerhead Backside Parasitic Plasma Suppression in a Secondary Purge Enabled Ald System